Adyghe Int. Sci. J. Vol. 25, No. 2. Pp. 25–36.
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DOI: https://doi.org/10.47928/1726-9946-2025-25-2-25-36
EDN: BTOARA
PHYSICS
| UDC 621.385.3 | Original Article |
Development and creation of basic components
of vacuum microelectronics
Bavizhev Mikhail Danilevich
Doctor of Physical and Mathematical Sciences, Professor, Laureate of the State Prize of the Russian Federation in Science and Technology, Full member of IAAS, Vice President, Director of the Research Center of the Joint-Stock Company Scientific and Production Enterprise “Radiy” (125057, Russia, Moscow, Chasovaya St., 28), ORCID: https://orcid.org/ 0000-0003-3074-5591, Mbavizhev@mail.ru
Bavizhev Zaur Ramazanovich
Senior Researcher, Joint Stock Company Scientific and Production Enterprise “Radiy” (125057, Russia, Moscow, Chasovaya St., 28), zu588@mail.ru
Abstract. The paper presents the results of a large-scale research work by a team of scientists from JSC NPP Radium and KBSU on the creation of prototypes of autoemission cathodes, grid assemblies and a mock-up of a vacuum microtriode as basic components of vacuum microelectronics and the study of their parameters. The design of the model includes a cathode with an autoemission film made in the form of a selective strip placed on a silicon substrate, as well as an anode-grid assembly (AGA), which is also formed on a silicon basis.
Keywords: vacuum microelectronics, cold cathode, silicon mesh, triode.
Funding. The work was not carried out within the framework of funds.
Competing interests. There are no conflicts of interest regarding authorship and publication.
Contribution and Responsibility. All authors contributed to this article. Authors are solely responsible for providing the final version of the article in print.
For citation. Bavizhev M. D., Bavizhev Z. R. Development and creation of basic components of vacuum microelectronics. Adyghe Int. Sci. J. 2025. Vol. 25, No. 2. Pp. 25–36.
DOI: https://doi.org/10.47928/1726-9946-2025-25-2-25-36; EDN: BTOARA
Submitted 18.04.2025; approved after reviewing 15.06.2025; accepted for publication 21.06.2025.
© Bavizhev M. D., Bavizhev Z. R., 2025
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